DIN EN ISO 14644-14:2017 Edition

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Cleanrooms and associated controlled environments – Part 14: Assessment of suitability for use of equipment by airborne particle concentration

Published By	Publication Date	Number of Pages
DIN	2017-01	28

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Categories: 13.040.35 - Cleanrooms and associated controlled environments, DIN

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Description

This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

Additional information

Published Code	DIN
Published By	Deutsches Institut für Normung
Publication Date	2017-01
Pages Count	28
Language	Germany
Descriptors	Air pollution, Air purity, Air quality, Airborne dust, Capability, Categories of purity, Classification, Classification systems, Clean rooms, Cleanliness, Clean-room technology, Concentration, Concentration of particles, Consistency, Definitions, Degree of purity, Determination of content, Documentation, Exterior areas, Fitness for purpose, Impurities, Instruments, Light scatter measurement, Measuring instruments, Methods, Number of particles, Particle analysis, Particle size, Particle size distribution, Particles, Particulate air pollutants, Processes, Pure air, Purity criterion, Purity test, Suitability, Testing, Procedures, Clean air, Fitness
File Size	1.5 MB
ICS Codes	13.040.35 - Cleanrooms and associated controlled environments

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DIN EN ISO 14644-14:2017 Edition

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