🔥🔥 Don’t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

🔍
ASME B89.1.8 2011 R2021

ASME B89.1.8 2011 R2021

$98.04

ASME B89.1.8 – 2011(R2021) Performance Evaluation of Displacement-Measuring Laser Interferometers

Published By Publication Date Number of Pages
ASME 2011
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Category:

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

This standard establishes requirements and methods for the specification, evaluation, setup and use of laser interferometers. This standard will explicitly discuss only single-pass optics and a single axis of linear displacement measurement. The standard is currently limited to ionized gas laser interferometer systems. Only single-color lasers will be considered in this version of the laser standard. Single color will include both homodyne systems and heterodyne systems (see Appendix E) where operating frequencies all lie within a Doppler broadened frequency band associated with one specific atomic transition or Zeeman multiplet. Diode laser systems, chirp systems, and two-color interferometers may be included in future versions of this standard. It should be noted that the folded common path comparison technique of this standard could be used to compare any of the above systems to a standard He-Ne laser interferometer.

PDF Catalog

PDF Pages PDF Title
4 FOREWORD
5 COMMITTEE ROSTER
6 CORRESPONDENCE WITH THE B89 COMMITTEE
7 1 SCOPE
2 DEFINITIONS
8 Figure
Fig. 2-1 Schematic Illustration of the Abbe Offset
11 3 SYSTEM PERFORMANCE EVALUATION: GENERAL CONSIDERATIONS
13 4 TEST PROCEDURE — LASER INTERFEROMETER COMPARISON TEST
14 Tables

Table 4.2- 1 Recommended Target Positions
18 Table 4.7.2- 1 Sensitivity Coefficients Associated With
19 Table 4.8- 1 Wavelength Corrections ( Parts in 106) for Low Humidity Air ( 25% RH)
Table 4.8- 2 Wavelength Corrections ( Parts in 106) for Medium Humidity Air ( 50% RH)
20 Table 4.8- 3 Wavelength Corrections ( Parts in 106) for High Humidity Air ( 75% RH)
Table 4.8- 4 Combinations of Environmental Conditions
22 5 VERIFYING TEST PERFORMANCE, ESTIMATING BIAS IN THE TEST, AND UNCERTAINTY OF RESULTS
23 Forms
Form 4.10-1 Reporting Results for Intercomparison Test
Form 4.10-2 Reporting Results for Sensor Calibration
Form 4.10-3 Reporting Overall Result
25 6 MEASUREMENT EVALUATION
26 Form 6-1 Sample Uncertainty Budget: Errors Predictable by Manufacturer
27 Form 6-2 Sample Uncertainty Budget: Combining Manufacturer’s Reported Uncertainty With Additional Sources of Error for a Metrology Laboratory
28 7 REFERENCES
31 NONMANDATORY APPENDICES

NONMANDATORY APPENDIX A UNCERTAINTY BUDGET FOR INTERFEROMETRIC LENGTH MEASUREMENTS
A- 1 INTRODUCTION
A- 2 SOURCES OF ERROR
32 Table A- 2.1- 1 Major Length- Dependent Errors: Uncertainties in Various Physical Parameters That Produce a 0.1 Part in 106 Uncertainty in Interferometric Length Measurements
35 Table A- 2.4- 1 Quantitative Effects of Various Sources of Error
A- 3 SAMPLE UNCERTAINTY BUDGET
39 NONMANDATORY APPENDIX B METHODS FOR COMPARING TWO INTERFEROMETER SYSTEMS
B- 1 FOUR METHODS FOR COMPARING INTERFEROMETERS
43 B- 2 COMMENTS AND DETAILED DESCRIPTIONS OF THE FOUR COMPARISON METHODS
47 NONMANDATORY APPENDIX C PERFORMING ACCURATE LINEAR MEASUREMENTS WITH A LASER INTERFEROMETER SYSTEM — BEST PROCEDURES AND PRACTICES
C- 1 INTRODUCTION
C- 2 LOCATION OF OPTICS
48 C- 3 BEAM ALIGNMENT
49 C- 4 WAVELENGTH COMPENSATION
Table C- 4.4- 1 Sensor Accuracies
50 C- 5 MATERIAL THERMAL EXPANSION COMPENSATION
51 Table C- 5.3- 1 Typical Expansion Coefficients for Different Materials Used in Construction of Machine Tools and Their Position Feedback Systems
52 C- 6 AIR TURBULENCE
53 C- 7 OTHER ERROR SOURCES
C- 8 CALIBRATION PROCEDURE
55 NONMANDATORY APPENDIX D RETESTING OF INTERFEROMETER SYSTEMS
56 NONMANDATORY APPENDIX E AC INTERFEROMETERS VERSUS DC INTERFEROMETERS
57 NONMANDATORY APPENDIX F SUGGESTIONS FOR TESTING THE MASTER INTERFEROMETER AND ESTIMATING UNCERTAINTY
F- 1 INTRODUCTION
F- 2 MASTER INTERFEROMETER
AND UNCERTAINTY
59 Table F- 2- 1 Estimated Length- Dependent Uncertainties in the Interferometer
Table F- 2- 2 Overall Uncertainty Budget for Length- Proportional Errors

Related products

ASME B89.1.8 2011 R2021
$98.04