ASTM-E684 2004(Redline)

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E684-04 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces (Redline)

Published By	Publication Date	Number of Pages
ASTM	2004	2

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Categories: 17.220.20 - Measurement of electrical and magnetic quantities, ASTM

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Description

Significance and Use

Sputter depth profiling is used in conjunction with Auger electron spectroscopy, x-ray photoelectron spectroscopy, ion scattering spectroscopy, and secondary ion mass spectrometry to determine the chemical composition and atomic concentration as a function of distance from the surface of a specimen. See Guide E 1127.

The diameter of the ion beam used for sputtering must be specified and this practice is a relatively quick method of measuring the shape (that is, current density distribution) of the ion beam if a suitable Faraday cup is not available. ³

1. Scope

1.1 This practice describes a simple and approximate method for determining the shape and current density of ion beams. The practice is limited to ion beams of diameter greater than 0.5 mm of the type used for sputtering of solid surfaces to obtain sputter depth profiles. It is assumed that the ion-beam current density is symmetrical about the beam axis.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E673 Terminology Relating to Surface Analysis E1127 Guide for Depth Profiling in Auger Electron Spectroscopy E1577 Guide for Reporting of Ion Beam Parameters Used in Surface Analysis

Keywords

ion beam sputtering;

ICS Code

ICS Number Code 17.220.20 (Measurement of electrical and magnetic quantities)

DOI: 10.1520/E0684-04 ASTM International is a member of CrossRef.

ASTM E684 (Molecular Spectroscopy Standards and Separation Science Standards)

Additional information

Standard Title	E684-04 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces (Redline)
Published Code	ASTM
Publication Date	2004
Pages Count	2
ICS Codes	17.220.20 - Measurement of electrical and magnetic quantities

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ASTM-E684 2004(Redline)

ASTM E684 (Molecular Spectroscopy Standards and Separation Science Standards)

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