ASTM-F154:2002 Edition

$44.96

F154-02 Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

Published By	Publication Date	Number of Pages
ASTM	2002	13

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Categories: 17.040.20 - Properties of surfaces, ASTM

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Description

ASTM F154-02

Withdrawn Standard: Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

ASTM F154

Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .

Keywords

contaminant; defects; dislocation; epitaxial; fracture; preferential etch; scratch; shallow pit; silicon; slip; stacking fault

ICS Code

ICS Number Code 17.040.20 (Properties of surfaces)

DOI: 10.1520/F0154-02

Additional information

Standard Title	F154-02 Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
Published Code	ASTM
Publication Date	2002
Pages Count	13
ICS Codes	17.040.20 - Properties of surfaces