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ASTM-F1593:1997 Edition

$40.63

F1593-97 Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer

Published By Publication Date Number of Pages
ASTM 1997 7
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ASTM F1593-97

Historical Standard: Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer

ASTM F1593

Scope

1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum.

1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS).

1.3 The aluminum matrix must be 99.9 weight % (3N-grade) pure, or purer, with respect to metallic impurities. There must be no major alloy constituent, for example, silicon or copper, greater than 1000 weight ppm in concentration.

1.4 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-controlled laboratory equipment skillfully used by an experienced operator is required to achieve the required sensitivity. This test method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination of sensitivity limits, etc.) known by the responsible technical committee to affect the reliability of high purity aluminum analyses.

Keywords

aluminum; electronics; glow discharge mass spectrometer (GDMS); purity analysis; sputtering target; trace metallic impurities

ICS Code

ICS Number Code n/a

DOI: 10.1520/F1593-97

ASTM-F1593
$40.63