ASTM-F25 2009

$40.63

F25/F25M-09 Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

Published By	Publication Date	Number of Pages
ASTM	2009	8

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Categories: 13.040.30 - Workplace atmospheres, ASTM

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Description

ASTM F25/F25M-09

Historical Standard: Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

ASTM F25/F25M

Scope

1.1 This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.

1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory requirements prior to use.

Keywords

airborne particle concentration; cleanroom; contamination; macroparticle; Dust-controlled areas; Electron tubes; Microscopic examination–electronic materials; Particulate contamination (aerospace environments); Semiconductor clean rooms

ICS Code

ICS Number Code 13.040.30 (Workplace atmospheres)

DOI: 10.1520/F0025_F0025M-09

PDF Catalog

PDF Pages	PDF Title
1	Scope Referenced Documents Terminology
2	Summary of Test Method Apparatus FIG. 1 FIG. 2
3	Sampling Apparatus Sampling in a Cleanroom, Clean Zone, or other Controlled Areas Sampling in a Duct or Pipe FIG. 3
4	Preparation of Apparatus Procedure FIG. 4 FIG. 5 FIG. 6
5	FIG. 7 FIG. 8
6	FIG. 9
7	Calculation Test Report FIG. 10
8	Precision and Bias Test Report Keywords

Additional information

Standard Title	F25/F25M-09 Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
Published Code	ASTM
Publication Date	2009
Pages Count	8
ICS Codes	13.040.30 - Workplace atmospheres