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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Status
Withdrawn
Title
Semiconductor devices. Micro-electromechanical devices – Terms and definitions
Publisher
BSI
Committee
EPL/47
Pages
28
Publication Date
2006-09-29
Withdrawn Date
2016-04-30
Replaced By
BS EN 62047-1:2016
ISBN
0 580 49123 4
Standard Number
BS EN 62047-1:2006
Identical National Standard Of
EN 62047-1:2006, IEC 62047-1:2005, EN 61223-3-1:1999
