BS EN ISO 14644-14:2016
$142.49
ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms – Assessment of suitability for use of equipment by airborne particle concentration
| Published By | Publication Date | Number of Pages |
| BSI | 2016 | 32 |
This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
The following items are not covered by this part of ISO 14644:
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assessment of suitability with respect to biocontamination;
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testing for suitability of decontamination agents and techniques;
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cleanability of equipment and materials;
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requirements on design of equipment and selection of materials;
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physical properties of materials (e.g. electrostatic, thermal properties);
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optimizing performance of equipment for specific process applications;
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selection and use of statistical methods for testing;
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protocols and requirements for local safety regulations.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 4 | European foreword |
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions |
| 11 | 4 General outline of the assessment 5 Visual inspection |
| 12 | 6 Assessment of suitability by airborne particle concentration measurements 6.1 General 6.2 Assessment procedure 6.2.1 Overview |
| 13 | 6.2.2 Requirements and considerations |
| 14 | 6.2.3 Representative mode of operation 6.2.4 Considerations for the test environment 6.2.5 Determination of the test environment 6.2.6 Approximate identification of HPC location(s) |
| 15 | 6.2.7 Precise determination of HPC location(s) 6.2.8 Suitability measurement(s) |
| 16 | 6.2.9 Data processing |
| 18 | 6.2.10 Reference to ISO 14644‑1 classification system 7 Documentation 7.1 General 7.2 Common documentation requirements |
| 19 | 7.3 Documentation for visual inspection 7.4 Documentation for assessment of test environment |
| 20 | 7.5 Documentation for classification measurement 8 Statement on cleanroom suitability |
| 22 | Annex A (informative) Example for data processing deriving from measurements |
| 26 | Annex B (informative) Additional optional tests |
| 29 | Bibliography |
