BS EN ISO 25178-604:2013

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Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Published By	Publication Date	Number of Pages
BSI	2013	52

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Categories: 17.040.20 - Properties of surfaces, BSI

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Description

This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

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PDF Pages	PDF Title
6	Foreword
7	Introduction
9	Section sec_1 Section sec_2 Section sec_2.1 Section sec_2.1.1 Section sec_2.1.2 1 Scope 2 Terms and definitions 2.1 Terms and definitions related to all areal surface texture measurement methods
10	Table tab_a Figure fig_1 Section sec_2.1.3 Section sec_2.1.4
11	Section sec_2.1.5 Section sec_2.1.6 Section sec_2.1.7 Section sec_2.1.8 Section sec_2.1.9 Section sec_2.1.10
12	Section sec_2.1.11 Section sec_2.1.12 Section sec_2.1.13 Section sec_2.1.14 Section sec_2.1.15 Section sec_2.1.16
13	Section sec_2.1.17 Section sec_2.1.18 Section sec_2.1.19 Section sec_2.1.20
14	Section sec_2.1.21 Table tab_1 Section sec_2.2 Section sec_2.2.1 Section sec_2.2.2 2.2 Terms and definitions related to x- and y-scanning systems
15	Table tab_2 Section sec_2.2.3 Section sec_2.2.4 Section sec_2.2.5 Section sec_2.2.6 Section sec_2.2.7
16	Section sec_2.2.8 Section sec_2.3 Section sec_2.3.1 Section sec_2.3.2 Section sec_2.3.3 Section sec_2.3.4 Section sec_2.3.5 2.3 Terms and definitions related to optical systems
17	Table tab_b Figure fig_2 Section sec_2.3.6 Section sec_2.3.7 Section sec_2.3.8
18	Section sec_2.4 Section sec_2.4.1 Section sec_2.4.2 Section sec_2.4.3 Section sec_2.4.4 Section sec_2.4.5 Section sec_2.4.6 Section sec_2.5 Section sec_2.5.1 2.4 Terms and definitions related to optical properties of the workpiece 2.5 Terms and definitions specific to coherence scanning interferometric microscopy
19	Table tab_3 Section sec_2.5.2 Section sec_2.5.3
20	Table tab_c Figure fig_3 Section sec_2.5.4 Section sec_2.5.5 Section sec_2.5.6
21	Section sec_2.5.7 Section sec_2.5.8 Section sec_2.5.9 Section sec_2.5.10 Section sec_2.5.11 Section sec_2.5.12
22	Section sec_2.5.13 Section sec_2.5.14 Section sec_2.5.15 Section sec_2.5.16 Section sec_3 Section sec_3.1 Section sec_3.2 3 Descriptions of the influence quantities 3.1 General 3.2 Influence quantities
23	Table tab_4
25	Annex sec_A Annex sec_A.1 Annex A (informative) Overview and components of a coherence scanning interferometry (CSI) microscope
26	Table tab_d Figure fig_A.1 Annex sec_A.2 Annex sec_A.3
27	Annex sec_A.4 Table tab_e Figure fig_A.2
28	Table tab_f Figure fig_A.3
29	Annex sec_A.5 Annex sec_A.6
30	Annex sec_B Annex sec_B.1 Table tab_g Figure fig_B.1 Annex sec_B.2 Annex sec_B.2.1 Annex B (informative) Coherence scanning interferometry (CSI) theory of operation
31	Table tab_h Figure fig_B.2 Annex sec_B.2.2
32	Table tab_i Figure fig_B.3
33	Table tab_j Figure fig_B.4 Annex sec_B.2.3
34	Table tab_k Figure fig_B.5 Table tab_l Figure fig_B.6
35	Annex sec_B.3 Annex sec_B.4
36	Annex sec_B.5 Table tab_B.1
37	Table tab_m Figure fig_B.7 Annex sec_B.6 Annex sec_B.7
38	Table tab_n Figure fig_B.8 Annex sec_B.8
39	Annex sec_C Annex sec_C.1 Annex C (informative) Spatial resolution
40	Table tab_o Figure fig_C.1
41	Table tab_C.1 Annex sec_C.2
42	Table tab_p Figure fig_C.2
43	Table tab_q Figure fig_C.3
44	Annex sec_D Annex D (informative) Example procedure for estimating surface topography repeatability
45	Annex sec_E Annex sec_E.1 Annex sec_E.2 Annex sec_E.3 Annex E (informative) Relation to the GPS matrix model
46	Table tab_E.1 Annex sec_E.4
47	Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Reference ref_18 Reference ref_19 Reference ref_20 Reference ref_21 Bibliography
48	Reference ref_22 Reference ref_23 Reference ref_24 Reference ref_25 Reference ref_26 Reference ref_27 Reference ref_28 Reference ref_29 Reference ref_30 Reference ref_31 Reference ref_32 Reference ref_33 Reference ref_34 Reference ref_35 Reference ref_36 Reference ref_37 Reference ref_38 Reference ref_39 Reference ref_40 Reference ref_41
49	Reference ref_42 Reference ref_43 Reference ref_44 Reference ref_45 Reference ref_46 Reference ref_47 Reference ref_48 Reference ref_49 Reference ref_50 Reference ref_51 Reference ref_52 Reference ref_53 Reference ref_54 Reference ref_55 Reference ref_56 Reference ref_57 Reference ref_58 Reference ref_59

Additional information

Status	Under Review
Pages	52
Publication Date	2013-08-31
ISBN	978 0 580 66355 0
Standard Number	BS EN ISO 25178-604:2013
Title	Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Identical National Standard Of	ISO 25178-604:2013, EN ISO 25178-604:2013
Descriptors	Surface properties, Optical measurement, Geometry, Profile, Roughness (surface), Surface-roughness measurement, Test equipment, Classification systems, Profile measurement, Area, Geometric surfaces, Surface texture
Publisher	BSI
Committee	TPR/1
ICS Codes	17.040.20 - Properties of surfaces

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BS EN ISO 25178-604:2013

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