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BS IEC 62047-30:2017

BS IEC 62047-30:2017

$142.49

Semiconductor devices. Micro-electromechanical devices – Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Published By Publication Date Number of Pages
BSI 2017 24
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This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

PDF Catalog

PDF Pages PDF Title
2 undefined
4 CONTENTS
6 FOREWORD
8 1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric thin film
4.1 General
9 Figures
Figure 1 – Test bed of direct and converse transverse piezoelectric coefficient of MEMS piezoelectric thin film
10 4.2 Functional blocks and components
4.2.1 General
4.2.2 Clamp
4.2.3 Linear actuator
Tables
Table 1 – Symbols and designations of test bed
11 4.2.4 Displacement meter
4.2.5 Electric measurement instrument
4.2.6 Power source
5 Thin film under testing
5.1 General
5.2 Measurement principle
12 5.3 Measuring procedures of direct transverse piezoelectric coefficient
5.4 Measuring procedures of converse transverse piezoelectric coefficient
13 6 Test report
15 Annex A (informative) Example of measuring method of MEMS piezoelectric thin film
A.1 General
A.2 Sample preparation procedures
A.3 Measuring procedures
A.3.1 Measuring procedures of direct transverse piezoelectric coefficient
16 Table A.1 – Poling treatment conditions
Table A.2 – Material properties for calculation ofdirect transverse piezoelectric coefficient
Table A.3 – Output voltage and calculated transverse piezoelectric coefficient
17 A.3.2 Measuring procedures of converse transverse piezoelectric coefficient
Figure A.1 – Tip displacement and calculated directtransverse piezoelectric coefficient
18 Table A.4 – Material properties for calculation of converse transverse piezoelectric coefficient
Table A.5 – Tip displacement of cantilever and calculated transverse piezoelectric coefficient
19 Figure A.2 – Input voltage and calculated converse transverse piezoelectric coefficient
20 A.4 Test report
Table A.6 – Example of measuring conditions and results of electro-mechanicalcharacteristics of piezoelectric thin film as mandatory
21 A.5 Equation of neutral plane
Table A.7 – Example of measuring conditions and results of electro-mechanical characteristics of piezoelectric thin film as optional
22 Bibliography

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BS IEC 62047-30:2017
$142.49