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BS ISO 11938:2012:2013 Edition

$102.76

Microbeam analysis. Electron probe microanalysis. Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

Published By Publication Date Number of Pages
BSI 2013 22
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This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X-ray intensity data method, the k-value method, the calibration method, the correlation method and the matrix correction method.

PDF Catalog

PDF Pages PDF Title
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Procedure of mapping analysis
4.1 General
4.2 Specimen preparation
11 4.3 Measurement procedure
14 5 Methods for displaying element maps
5.1 General
5.2 Raw X‑ray intensity method
5.3 k‑value method
5.4 Calibration curve method
15 5.5 Correlation method
5.6 Matrix correction method
6 Evaluation of uncertainty
7 Report
17 Annex A
(normative)

Comparison of absorption effects for a light element

18 Bibliography
BS ISO 11938:2012
$102.76