BS ISO 11952:2019
$215.11
Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems
| Published By | Publication Date | Number of Pages |
| BSI | 2019 | 72 |
This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
This document has the following objectives:
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to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;
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to define the minimum requirements for the calibration process and the conditions of acceptance;
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to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument);
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to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);
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to provide a model, in accordance with ISO/IEC Guide 98-3 , to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;
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to define the requirements for reporting results.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | undefined |
| 7 | Foreword |
| 11 | Introduction |
| 13 | 1 Scope 2 Normative references 3 Terms and definitions |
| 14 | 4 Symbols |
| 16 | 5 Characteristics of SPMs 5.1 Components of an SPM |
| 18 | 5.2 Metrological categories of SPMs 5.3 Block diagram of an SPM 5.3.1 For category C: 5.3.2 Additionally, for category B: |
| 19 | 5.3.3 Additionally, for category A: 5.4 Calibration interval |
| 20 | 6 Preliminary characterization of the measuring system 6.1 Overview of the instrument characteristics and influencing factors to be investigated |
| 22 | 6.2 Waiting times after interventions in the measuring system (e.g. instrument installation, intrinsic effects, carrying out operation, warm-up, tip/specimen change) 6.2.1 Adjustment of the instrument to ambient conditions 6.2.2 Potential causes of drift 6.2.3 Procedure |
| 23 | 6.3 External influences 6.3.1 Sources of external influences 6.3.2 Consequences of external influences and countermeasures 6.4 Summary |
| 24 | 7 Calibration of scan axes 7.1 General 7.2 Measurement standards 7.2.1 Requirements for measurement standards |
| 25 | 7.2.2 Handling of measurement standards 7.3 Xy-scanner guidance deviations of the x- and y-axes (xtz, ytz) 7.3.1 Definition of xy-scanner guidance deviations in vertical direction (z-plane) 7.3.2 Measurement strategy |
| 26 | 7.3.3 Flatness measurement standards |
| 27 | 7.3.4 Measurements 7.3.5 Evaluation of results |
| 28 | 7.3.6 Summary 7.3.7 Extended calibration measurements |
| 29 | 7.4 Calibration of x- and y-axis (Cx, Cy) and of rectangularity (ϕxy) and determination of deviations (xtx, yty, ywx) 7.4.1 General 7.4.2 Definition of pitch px and py and rectangularity (ϕxy) in the x-y-plane 7.4.3 Measurement strategy |
| 30 | 7.4.4 Selection of lateral measurement standards |
| 31 | 7.4.5 Basic calibration — Adjustments and measurements |
| 32 | 7.4.6 Extended calibrations (scan speed, angle, and eccentric measurements) |
| 33 | 7.4.7 Evaluation |
| 36 | 7.4.8 Extended evaluations: nonlinearity of the x-y-axis |
| 37 | 7.4.9 Summary |
| 38 | 7.5 Calibration of the z-axis Cz, ϕxz, and ϕyz, and determination of the deviations ztz, zwx, and zwy 7.5.1 General 7.5.2 Definitions of the step height |
| 39 | 7.5.3 Measurement strategy 7.5.4 Selection of step height measurement standards |
| 40 | 7.5.5 Basic calibration — Adjustments and measurements |
| 41 | 7.5.6 Extended calibrations |
| 42 | 7.5.7 Evaluations |
| 46 | 7.5.8 Summary 7.6 3D measurement standards for alternative and extended calibration 7.6.1 General 7.6.2 Requirements for 3D measurement standards |
| 47 | 7.6.3 Selection of the 3D measurement standards |
| 48 | 7.6.4 Carrying-out of the basic calibration 7.6.5 Evaluation of the measurements |
| 49 | 7.6.6 Extended calibrations 7.6.7 Advantages and disadvantages of the 3D measurement standard |
| 50 | 8 Report of calibration results 8.1 General 8.2 Equipment used 8.3 Statements on ambient conditions |
| 51 | 8.4 From Clause 5: Preliminary investigations 8.5 From Clause 5: Calibration — Details of measurement standards, scan range and scan speed 8.6 Further statements 9 Uncertainties of measurement 9.1 General |
| 52 | 9.2 Vertical measurand (height and depth) |
| 53 | 10 Report of results (form) |
| 54 | Annex A (informative) Example of superposition of disturbing influences in the topography image |
| 56 | Annex B (informative) Sound investigations: effects of a sound-proofing hood |
| 58 | Annex C (informative) Thermal isolation effect of a sound-proofing hood/measuring cabin |
| 60 | Annex D (informative) Handling of contaminations in recorded topography images |
| 61 | Annex E (informative) Step height determination: comparison between histogram and ISO 5436-1 method |
| 63 | Annex F (normative) Uncertainty of measurement for lateral measurands (pitch, position, diameter) |
| 68 | Bibliography |
