BS ISO 13095:2014
$167.15
Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
| Published By | Publication Date | Number of Pages |
| BSI | 2014 | 36 |
This International Standard specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u0, where u0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Introduction |
| 9 | Section sec_1 Section sec_2 Section sec_3 Section sec_3.1 Section sec_3.2 Section sec_3.3 Section sec_3.4 1 Scope 2 Normative references 3 Terms and definitions |
| 10 | Section sec_3.5 Section sec_3.6 Section sec_3.7 Section sec_3.8 Section sec_3.9 Section sec_3.10 Section sec_3.11 |
| 11 | Figure fig_1 Section sec_4 4 Symbols and abbreviated terms |
| 12 | Section sec_5 Section sec_5.1 5 Procedure for probe characterization 5.1 Methods for the determination of AFM probe shapes |
| 13 | Table tab_1 Section sec_5.2 5.2 Reference sample setting |
| 14 | Figure fig_2 Section sec_5.3 5.3 Requirements of AFM and AFM imaging |
| 15 | Section sec_5.4 Section sec_5.4.1 Section sec_5.4.2 5.4 Measurement of probe shank profile |
| 16 | Figure fig_3 Section sec_5.4.3 |
| 17 | Figure fig_4 Section sec_5.5 Section sec_5.5.1 5.5 Uncertainty of the measurement of the probe shank profile |
| 18 | Section sec_5.5.2 Section sec_6 6 Reporting of probe characteristics |
| 20 | Annex sec_A Annex sec_A.1 Figure fig_A.1 Annex sec_A.2 Annex A (informative) Dependence of AFM images on measurement mode and settings |
| 21 | Figure fig_A.2 |
| 22 | Figure fig_A.3 |
| 23 | Annex sec_B Annex sec_B.1 Figure fig_B.1 Table tab_B.1 Annex sec_B.2 Annex B (normative) Reference sample preparation |
| 24 | Figure fig_B.2 Annex sec_B.3 |
| 25 | Figure fig_B.3 |
| 26 | Annex sec_C Annex sec_C.1 Annex C (informative) Example of a reference structure |
| 27 | Figure fig_C.1 |
| 28 | Annex sec_D Annex sec_D.1 Annex D (informative) Results of EPSC measurement repeatability test |
| 29 | Figure fig_D.1 Figure fig_D.2 |
| 30 | Annex sec_E Figure fig_E.1 Annex E (informative) Plane correction for probe shank profile analysis |
| 31 | Annex sec_F Table tab_F.1 Annex F (informative) Example of a report |
| 33 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Bibliography |
