BS ISO 14291:2012
$142.49
Vacuum gauges. Definitions and specifications for quadrupole mass spectrometers
| Published By | Publication Date | Number of Pages |
| BSI | 2012 | 26 |
This International Standard defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
This International Standard applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically >300. QMSs with other ion sources, such as those of the chemical ionization, photoionization, and field ionization types, as well as the measurements of m/z above 300, which are mainly used to specify organic materials, lie outside the scope of this International Standard.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 3 | CVP_Secretariat_Loca |
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Terms and definitions 2.1 Definitions of components |
| 13 | 2.2 Definitions of physical parameters |
| 16 | 3 Symbols and abbreviated terms |
| 17 | 4 Principle of QMS 5 Specifications for a QMS to be provided by manufacturers 5.1 Mass range 5.2 Type of ion source 5.3 Type of ion detector |
| 18 | 5.4 Mass resolution 5.5 Mass number stability 5.6 Sensitivity 5.7 Linear response range 5.8 Minimum detectable partial pressure 5.9 Minimum detectable concentration 5.10 Maximum operational pressure 5.11 Scanning parameter |
| 19 | 5.12 Signal output 5.13 Potentials 5.14 Detector specifications 5.15 Set point 5.16 Maximum bake-out temperature 5.17 Nominal operating conditions 5.18 Warm-up time 5.19 Filament material 5.20 Electron emission current 5.21 Filament exchange 5.22 Detector exchange |
| 20 | 5.23 Fitting to chamber 5.24 Mounting orientation 5.25 Dimensions 5.26 Internal volume 5.27 Mass of sensor head and electronic unit 5.28 Input power of electronic unit 5.29 Cable 5.30 Software 5.31 Interface 5.32 Storage and transportation condition |
| 21 | 6 Optional specifications for QMS to be provided by manufacturers 6.1 Mass resolution 6.2 Fragmentation or cracking pattern 6.3 Temperature coefficient of sensitivity 6.4 QMS sensor cleaning 6.5 Degassing 6.6 Degassing power 6.7 Photographs 6.8 Inspection record 6.9 Outgassing rate |
| 22 | Bibliography |
