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BS ISO 14706:2000:2001 Edition

BS ISO 14706:2000:2001 Edition

$142.49

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Published By Publication Date Number of Pages
BSI 2001 32
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Status

Withdrawn
Title

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Publisher

BSI
Committee

CII/60
Pages

32
Publication Date

2001-05-15
Withdrawn Date

2014-07-31
Replaced By

BS ISO 14706:2014
ISBN

0 580 37252 9
Standard Number

BS ISO 14706:2000
Identical National Standard Of

ISO 14706:2000
Descriptors

Surface chemistry, Reflection, Epitaxial layers, Contamination, Substrates (insulating), X-ray analysis, Fluorimetry, Density, X-ray fluorescence spectrometry, Surface properties, Atoms, Silicon, Surfaces, Surfactants, Chemical analysis and testing, Contaminants
ICS Codes 71.040.40 - Chemical analysis

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BS ISO 14706:2000
$142.49