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BS ISO 15471:2016

BS ISO 15471:2016

$102.76

Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters

Published By Publication Date Number of Pages
BSI 2016 16
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PDF Catalog

PDF Pages PDF Title
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Description of selected instrumental performance parameters
5.1 Method of analysis
10 5.2 Samples
5.3 System configuration
5.4 Electron gun cathode
5.4.1 Cathode type
5.4.2 Cathode lifetime
5.5 Lateral resolution and beam current
5.5.1 General
5.5.2 Method 1
11 5.5.3 Method 2
5.5.4 Method 3
5.6 Spectrometer intensity performance and energy resolution
5.6.1 General
5.6.2 Method 1
12 5.6.3 Method 2
5.7 Spectrometer energy scale
5.8 Spectrometer intensity linearity
5.9 Spectrometer response function
5.10 Spectrometer parameters
5.10.1 Spectrometer aberration
5.10.2 Analytical area
5.11 Image drift
5.12 Vacuum environment
13 Bibliography

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BS ISO 15471:2016
$102.76