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BS ISO 19685:2017

$102.76

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for Pirani gauges

Published By Publication Date Number of Pages
BSI 2017 22
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This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges.

This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.

This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards.

In addition, this document defines procedures to characterize Pirani gauges for response time and hysteresis.

PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
8 1 Scope
2 Normative references
3 Terms and definitions
11 4 Symbols and abbreviated terms
5 Principle of Pirani gauge
12 6 Specifications for Pirani gauge
6.1 General
6.2 Measuring principle
6.3 Type of output
6.4 Range of output and output display resolution
6.5 Measurement range and full scale
6.6 Expected measurement uncertainty
6.7 Material exposed to gas
6.8 Connecting flange
13 6.9 Interface and pin-connections
6.10 Warm-up period
6.11 Compatibility between gauge tube and controller
6.12 Normal operating (environment) conditions
6.13 Electrical power supply
6.14 Cable length
6.15 Maximum bake-out temperature
6.16 Dimensions of gauge head and controller
6.17 Mounting orientation
7 Additional (optional) specifications for Pirani gauge
7.1 Long-term instability
14 7.2 Relative sensitivity factor
7.3 Hysteresis
7.4 Response time
7.5 Inspection record and calibration certificate
7.6 Configuration
7.7 Weight
7.8 Storage and transport condition
7.9 Photographs
7.10 Maximum power consumption
7.11 Set point of pressure
8 Calibration and other measurement procedures
8.1 General
15 8.2 Conditions for calibrations
8.3 Assembly and adjustments of calibration item
16 8.4 Calibration
8.5 Measurement uncertainties during calibration
8.6 Calibration certificate
17 8.7 Measurement procedure for hysteresis
8.8 Measurement procedure of response time
9 Measurement uncertainties at use
19 Annex A (informative) Typical Pirani gauge
20 Bibliography
BS ISO 19685:2017
$102.76