BS ISO 21466:2019
$198.66
Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM
| Published By | Publication Date | Number of Pages |
| BSI | 2019 | 56 |
This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and photomask by imaging with a critical dimension scanning electron microscope (CD-SEM) by the model-based library (MBL) method. The method is applicable to linewidth determination for specimen, such as, gate on wafer, photomask, single isolated or dense line feature pattern down to size of 10 nm.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | undefined |
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions |
| 16 | 4 Symbols and abbreviated terms 5 Generation of Model-based Library (MBL) 5.1 Basic components of a MBL simulator 5.1.1 Electron probe model |
| 18 | 5.1.2 SE signal generation model |
| 19 | 5.1.3 SE signal detection model |
| 20 | 5.2 Model of specimen 5.2.1 Specimen structure and parameters |
| 23 | 5.2.2 Specimen specification 5.2.3 Generation methods of specimen geometry 5.3 Monte Carlo simulation 5.3.1 Input parameters |
| 24 | 5.3.2 Beam-specimen interaction 5.4 MBL file structure 5.4.1 Variable type and value |
| 28 | 5.4.2 Model description file |
| 29 | 5.4.3 Parameter specification file 5.4.4 Preparation of library data |
| 30 | 5.4.5 MBL data structure 5.4.6 MBL data file format |
| 31 | 6 Acquisition of a CD-SEM image 6.1 Acceptable image 6.2 Specimen tilt 6.3 Image quality 6.4 Selection of the field of view 6.5 CD-SEM image data file 7 CD determination |
| 32 | 7.1 Determination of pixel size 7.2 Selection of the field of interest 7.3 Coordination and normalization |
| 33 | 7.4 Matching procedure 7.4.1 Interpolation 7.4.2 Convolution |
| 34 | 7.4.3 Matching |
| 38 | 7.4.4 Averaging |
| 39 | 8 Module functions and relationship |
| 41 | 9 Uncertainty of CD measurement |
| 43 | Annex A (normative) Flow charts of procedures |
| 47 | Annex B (informative) Example of model description file |
| 48 | Annex C (informative) Example of parameter specification file |
| 49 | Annex D (informative) Example of CD evaluation |
| 52 | Bibliography |
