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BS ISO 23170:2022

$167.15

Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering

Published By Publication Date Number of Pages
BSI 2022 38
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PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
4 Principle and recommendations of MEIS analysis
10 5 MEIS analysis
6 MEIS spectra simulation
13 7 Reporting MEIS analysis results
14 Annex A (informative) Interlaboratory test report
27 Annex B (informative) List of MEIS spectra simulation program sources and a procedure of MEIS spectra simulation using PowerMeis
30 Annex C (informative) Reliability of the IAEA electronic stopping power data
32 Annex D (informative) Fitting parameters A, B, C, D from the IAEA database
37 Bibliography
BS ISO 23170:2022
$167.15