BSI 16/30348371 DC:2016 Edition
$13.70
BS ISO 14644-12. Cleanrooms and associated controlled environments. Part 12. Specifications for monitoring air cleanliness by nanoscale particle concentration
| Published By | Publication Date | Number of Pages |
| BSI | 2016 | 21 |
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions |
| 10 | 3.1 General 3.2 Size |
| 11 | 3.3 Airborne particles 3.4 Occupancy states |
| 12 | 3.5 Measuring apparatus 4 Monitoring 4.1 General 4.2 Principle |
| 13 | 4.3 Methods 5 Test report |
| 14 | Annex A (normative) Reference method for monitoring by condensation particle counting |
| 18 | Annex B (informative) Particle counting efficiency and particle size cutoff |
| 21 | Bibliography |
