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BSI 24/30486622 DC 2024

BSI 24/30486622 DC 2024

$13.70

BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices – Part 49. Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Published By Publication Date Number of Pages
BSI 2024 11
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PDF Catalog

PDF Pages PDF Title
1 30486622-NC.pdf
3 47F_462e_CD.pdf
5 FOREWORD
7 1 Scope
2 Normative references
3 Terms and definitions
8 4 Test bed of MEMS piezoelectric thin film
4.1 General
4.2 Initial measurements
4.3 Tests
4.3.1 DUT setup and environmental conditions
9 4.3.2 Test duration
4.3.3 Number of tests and number of DUTs
4.4 Final measurements
5 Environmental and dielectric withstand testing
5.1 Environmental testing
5.1.1 General
10 5.1.2 High-temperature bias test
5.1.3 High-temperature and high-humidity bias test
11 5.1.4 High-temperature storage
5.1.5 High-temperature and high-humidity storage

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BSI 24/30486622 DC 2024
$13.70