IEC 62047-1:2005
$56.55
Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
| Published By | Publication Date | Number of Pages |
| IEC | 2005-09-27 | 58 |
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
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