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IEC 62047-34:2019

$22.75

Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Published By Publication Date Number of Pages
IEC 2019-04-05 20
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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

IEC 62047-34:2019
$22.75