IEC 62047-34:2019
$22.75
Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Published By | Publication Date | Number of Pages |
IEC | 2019-04-05 | 20 |
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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
Published Code | IEC |
---|---|
Published By | International Electrotechnical Commission |
Publication Date | 2019-04-05 |
Pages Count | 20 |
Language | English |
Edition | 1.0 |
File Size | 1.2 MB |
ICS Codes | 31.080.99 - Other semiconductor devices 31.140 - Piezoelectric devices |
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