ISO 14594:2014

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Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Published By	Publication Date	Number of Pages
ISO	2014-10	24

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Categories: 71.040.50 - Physicochemical methods of analysis, ISO

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Description

ISO 14594:2014 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.

It is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions.

It is not designed to be used for energy dispersive X-ray spectroscopy.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2014-10
Pages Count	24
Language	English
Edition	2
File Size	1003.5 KB
ICS Codes	71.040.50 - Physicochemical methods of analysis

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ISO 14594:2014

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