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NFPA 318:2009 Edition

NFPA 318:2009 Edition

$80.71

Standard for the Protection of Semiconductor Fabrication Facilities

Published By Publication Date Number of Pages
NFPA 2009 35
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Today’s NFPA 318 safeguards people and property in plants and research facilities.

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled–containing a cleanroom or clean zone or both. For the 2009 edition, the document’s scope was revised to apply to semiconductor fabrication facilities and areas with comparable fabrication processes and risks.

Major technical changes for 2009 include:

  • First-time requirements for Sub Atomic Gas (SAG) Systems
  • New requirements involving exhaust ducts
  • Maximum hazardous chemical quantities at a workstation limited to 3 cylinders to reduce change-out frequency
  • Revisions to safety considerations for chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, and production and support equipment

Facility owners and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements based on industry needs, new technology, and recent experience.

PDF Catalog

PDF Pages PDF Title
2 Important Notices and Disclaimers
Important Notices and Disclaimers
3 Additional Notices and Disclaimers
Additional Notices and Disclaimers
4 2.1 General
2.1 General
2.2 NFPA Publications
2.2 NFPA Publications
7 Chapter 1 Administration
Chapter 1 Administration
1.1 Scope
1.1 Scope
1.2 Purpose
1.2 Purpose
1.3 Retroactivity
1.3 Retroactivity
1.4 Equivalency
1.4 Equivalency
1.5 Units
1.5 Units
Chapter 2 Referenced Publications
Chapter 2 Referenced Publications
8 2.3 Other Publications
2.3 Other Publications
2.4 References for Extracts in Mandatory Sections
2.4 References for Extracts in Mandatory Sections
Chapter 3 Definitions
Chapter 3 Definitions
3.1 General
3.1 General
3.2 NFPA Official Definitions
3.2 NFPA Official Definitions
3.3 General Definitions
3.3 General Definitions
10 Chapter 4 Fire Protection
Chapter 4 Fire Protection
4.1 Automatic Fire-Extinguishing Systems
4.1 Automatic Fire-Extinguishing Systems
11 4.2 Alarm Systems
4.2 Alarm Systems
4.3 Detection Systems
4.3 Detection Systems
Chapter 5 Ventilation and Exhaust Systems
Chapter 5 Ventilation and Exhaust Systems
5.1 Air Supply and Recirculation Systems
5.1 Air Supply and Recirculation Systems
5.2 Local Hazardous Chemical Exhaust System
5.2 Local Hazardous Chemical Exhaust System
5.3 Local Hazardous Chemical Exhaust System Construction
5.3 Local Hazardous Chemical Exhaust System Construction
12 5.4 General Conditions
5.4 General Conditions
5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution
5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution
5.6 Hazardous Chemical Exhaust Controls
5.6 Hazardous Chemical Exhaust Controls
Chapter 6 Construction
Chapter 6 Construction
6.1 Classification of Occupancy
6.1 Classification of Occupancy
6.2 Noncombustible Construction Components
6.2 Noncombustible Construction Components
6.3 Fire Resistance Rating
6.3 Fire Resistance Rating
6.4 Electrical Classification
6.4 Electrical Classification
6.5 Emergency Power System
6.5 Emergency Power System
6.6 Occupied Levels of Fabrication Areas
6.6 Occupied Levels of Fabrication Areas
6.7 Pass-Throughs in Existing Exit Access Corridors
6.7 Pass-Throughs in Existing Exit Access Corridors
13 6.8 Fabrication Areas
6.8 Fabrication Areas
6.9 Vertical Openings
6.9 Vertical Openings
Chapter 7 Chemical Storage and Handling
Chapter 7 Chemical Storage and Handling
7.1 Hazardous Chemicals
7.1 Hazardous Chemicals
7.2 Flammable and Combustible Liquid Delivery Systems
7.2 Flammable and Combustible Liquid Delivery Systems
16 7.3 Container Delivery
7.3 Container Delivery
7.4 Liquid Waste Disposal
7.4 Liquid Waste Disposal
7.5 Spill Protection
7.5 Spill Protection
17 7.6 Supply Piping
7.6 Supply Piping
7.7 Welding
7.7 Welding
7.8 Pyrophoric Liquids
7.8 Pyrophoric Liquids
Chapter 8 Hazardous Gas Cylinder Storage and Distribution
Chapter 8 Hazardous Gas Cylinder Storage and Distribution
8.1 Packaging
8.1 Packaging
8.2 Transport to the Semiconductor Facility
8.2 Transport to the Semiconductor Facility
8.3 Distribution Systems
8.3 Distribution Systems
18 8.4 Silane and Silane/Nontoxic Mixes Storage and Dispensing Areas
8.4 Silane and Silane/Nontoxic Mixes Storage and Dispensing Areas
8.5 Silane/Toxic Mixes Storage and Dispensing Areas
8.5 Silane/Toxic Mixes Storage and Dispensing Areas
19 8.6 Flammable or Toxic Gases
8.6 Flammable or Toxic Gases
20 8.7 Vent Headers
8.7 Vent Headers
8.8 Training
8.8 Training
8.9 Treatment Systems
8.9 Treatment Systems
Chapter 9 Bulk Silane Systems
Chapter 9 Bulk Silane Systems
9.1 Tube Trailer Systems
9.1 Tube Trailer Systems
21 9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders
9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders
Chapter 10 Production and Support Equipment
Chapter 10 Production and Support Equipment
10.1 General
10.1 General
10.2 Interlocks
10.2 Interlocks
10.3 Electrical Design
10.3 Electrical Design
10.4 Process Liquid Heating Equipment
10.4 Process Liquid Heating Equipment
22 10.5 Materials of Construction
10.5 Materials of Construction
10.6 Vacuum Pumps
10.6 Vacuum Pumps
10.7 Hazardous Gas Delivery Systems
10.7 Hazardous Gas Delivery Systems
10.8 Tools Using Flammable or Combustible Chemicals
10.8 Tools Using Flammable or Combustible Chemicals
10.9 Gas-Detection Systems
10.9 Gas-Detection Systems
23 10.10 Emergency Alarm System
10.10 Emergency Alarm System
Chapter 11 Emergency Control Station
Chapter 11 Emergency Control Station
11.1 Emergency Control Station
11.1 Emergency Control Station
Chapter 12 General Safety Precautions
Chapter 12 General Safety Precautions
12.1 Emergency Plan
12.1 Emergency Plan
12.2 Emergency Response Team
12.2 Emergency Response Team
12.3 Emergency Drills
12.3 Emergency Drills
Chapter 13 Means of Egress
Chapter 13 Means of Egress
13.1 Means of Egress
13.1 Means of Egress
24 13.2 Service Corridors
13.2 Service Corridors
Annex A Explanatory Material
Annex A Explanatory Material
28 Annex B Seismic Protection
Annex B Seismic Protection
Annex C Production and Support Equipment
Annex C Production and Support Equipment
29 Annex D Informational References
Annex D Informational References
30 Index
Index
32 Formal Interpretation
Formal Interpretation

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