NFPA 318 2015

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NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities

Published By	Publication Date	Number of Pages
NFPA	2015	43

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Category: NFPA

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Description

Chemical safety and emergency response demand the 2015 NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities. The semiconductor industry is continually growing, requiring new safeguards to address evolving hazards. Completely reorganized and up-to-date with the latest coverage of technologies such as photovoltaics, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled — containing a cleanroom or clean zone or both. Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress. This edition adds display panel and photovoltaic production to its scope, along with other major changes. The 2015 NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors. This rewritten, clarified edition provides new definitions, identification of hazardous materials categories, and an introduction to Hazard Production Material (HPM) risk assessment. It also adds numerous new requirements addressing: Hazardous materials Liquid chemical storage and handling Gas storage and handling Production and support equipment Waste treatment Fire protection Get the latest requirements for semiconductor fabrication facilities, in the most user-friendly format, in the 2015 NFPA 318.

PDF Catalog

PDF Pages	PDF Title
2	Important Notices and Disclaimers
3	Additional Notices and Disclaimers
4	2.1 General 2.2 NFPA Publications
8	Chapter 1 Administration 1.1 Scope 1.2 Purpose 1.3 Retroactivity 1.4 Equivalency 1.5 Units Chapter 2 Referenced Publications
9	2.3 Other Publications 2.4 References for Extracts in Mandatory Sections Chapter 3 Definitions 3.1 General 3.2 NFPA Official Definitions
10	3.3 General Definitions
12	Chapter 4 Building Construction and Related Services 4.1 General 4.2 Classification of Occupancy 4.3 Noncombustible Construction Components 4.4 Fire Resistance Rating 4.5 Pass-Throughs in Existing Exit Access Corridors 4.6 Vertical Openings 4.7 Air Supply and Recirculation Systems 4.8 Electrical Classification
13	4.9 Emergency Power System 4.10 Means of Egress Chapter 5 Hazardous Materials — General Provisions 5.1 Hazardous Chemicals 5.2 HPM Risk Assesment 5.3 Container Delivery
14	5.4 Storage and Handling of Hazardous Chemicals 5.5 Separation of Hazardous Chemicals
16	5.6 Systems, Equipment, and Processes
17	5.7 Supply Piping 5.8 Welding Chapter 6 Liquid Chemical Storage and Handling 6.1 General 6.2 Flammable and Combustible Liquid Delivery Systems
18	6.3 Spill Protection 6.4 Pyrophoric Liquids 6.5 Corrosive Liquids
19	6.6 Toxic and Highly Toxic Materials 6.7 Water Reactive Chemistries 6.8 Oxidizers Chapter 7 Gas Storage and Handling 7.1 General
20	7.2 Corrosive Gases 7.3 Flammable Gases 7.4 Oxidizing Gases 7.5 Pyrophoric Gases 7.6 Silane Systems
21	7.7 Toxic and Highly Toxic Gases 7.8 Unstable Reactive Gases 7.9 Cryogenic Fluids 7.10 Bulk Oxygen Systems 7.11 Gaseous Hydrogen Systems 7.12 Liquefied Hydrogen Systems 7.13 Gas Generation Systems 7.14 Dopant Gas Sources Chapter 8 Production and Support Equipment 8.1 General 8.2 Materials of Construction 8.3 Equipment Safety Systems and Interlocks
22	8.4 Electrical Design 8.5 Process Liquid Heating Equipment 8.6 General Requirements for Tools Using Flammable or Combustible Liquids
23	8.7 Photolithography Tools 8.8 Ion Implanters 8.9 Wet Process and Wet Etch Tools 8.10 CVD and Furnace Tools 8.11 Automated Materials Handling Systems (AMHS) 8.12 Support Equipment 8.13 Production Equipment Fire Protection 8.14 Exposures Chapter 9 Exhaust Systems 9.1 General Exhaust Conditions
24	9.2 Local Hazardous Chemical Exhaust System 9.3 Local Hazardous Chemical Exhaust System Construction 9.4 Hazardous Chemical Exhaust Duct Airflow and Dilution 9.5 Exhaust Ducts 9.6 Hazardous Chemical Exhaust Controls Chapter 10 Waste Treatment 10.1 Waste Recovery and Handling Systems 10.2 Acid Waste Treatment Facility Safeguards
25	10.3 Organic Waste Treatment Facilities 10.4 Waste Liquid Handling 10.5 Effluent Treatment Systems 10.6 Scrubbers 10.7 Vapor Recovery and Vapor Processing Systems
26	Chapter 11 Fire Protection 11.1 Facility-Wide Systems 11.2 Protection of Specific Facility Elements
27	Chapter 12 General Safety Precautions 12.1 Emergency Plan
28	12.2 Emergency Response Team 12.3 Emergency Drills Annex A Explanatory Material
34	Annex B Seismic Protection Annex C Production and Support Equipment
35	Annex D Informational References
36	Index