{"id":233230,"date":"2024-10-19T15:11:59","date_gmt":"2024-10-19T15:11:59","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-624182010\/"},"modified":"2024-10-25T09:40:48","modified_gmt":"2024-10-25T09:40:48","slug":"bs-en-624182010","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-624182010\/","title":{"rendered":"BS EN 62418:2010"},"content":{"rendered":"
IEC 62418:2010 describes a method of metallization stress void test and associated criteria. It is applicable to aluminium (Al) or copper (Cu) metallization.<\/p>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
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5<\/td>\n | English CONTENTS <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | 1 Scope 2 Test equipment 3 Test structure 3.1 Test structure patterns 3.2 Line pattern 3.3 Via chain pattern <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | 4 Stress temperature 5 Procedure 5.1 Stress void evaluation methods 5.2 Resistance measurement method <\/td>\n<\/tr>\n | ||||||
8<\/td>\n | 5.3 Inspection method Table 1 \u2013 Void classification <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 6 Failure criteria 6.1 Resistance method 6.2 Inspection method 7 Data interpretation and lifetime extrapolation (resistance change method) <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | 8 Items to be specified and reported 8.1 Resistance change method <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 8.2 Inspection method <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | Annex A (informative) Stress migration mechanism Figure A.1 \u2013 Schematic representation of the stress-void formation mechanism in Al <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | Annex B (informative) Technology-dependent factors for aluminium <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Annex C (informative) Technology-dependent factors for copper <\/td>\n<\/tr>\n | ||||||
16<\/td>\n | Annex D (informative) Precautions <\/td>\n<\/tr>\n | ||||||
18<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Semiconductor devices. Metallization stress void test<\/b><\/p>\n |