{"id":290612,"date":"2024-10-19T19:43:22","date_gmt":"2024-10-19T19:43:22","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-130952014\/"},"modified":"2024-10-25T16:43:45","modified_gmt":"2024-10-25T16:43:45","slug":"bs-iso-130952014","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-130952014\/","title":{"rendered":"BS ISO 13095:2014"},"content":{"rendered":"

This International Standard specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u<\/i>0<\/sub>, where u<\/i>0<\/sub> is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\nSection sec_1
Section sec_2
Section sec_3
Section sec_3.1
Section sec_3.2
Section sec_3.3
Section sec_3.4
1\tScope
2\tNormative references
3\tTerms and definitions <\/td>\n<\/tr>\n
10<\/td>\nSection sec_3.5
Section sec_3.6
Section sec_3.7
Section sec_3.8
Section sec_3.9
Section sec_3.10
Section sec_3.11 <\/td>\n<\/tr>\n
11<\/td>\nFigure fig_1
Section sec_4
4\tSymbols and abbreviated terms <\/td>\n<\/tr>\n
12<\/td>\nSection sec_5
Section sec_5.1
5\tProcedure for probe characterization
5.1\tMethods for the determination of AFM probe shapes <\/td>\n<\/tr>\n
13<\/td>\nTable tab_1
Section sec_5.2
5.2\tReference sample setting <\/td>\n<\/tr>\n
14<\/td>\nFigure fig_2
Section sec_5.3
5.3\tRequirements of AFM and AFM imaging <\/td>\n<\/tr>\n
15<\/td>\nSection sec_5.4
Section sec_5.4.1
Section sec_5.4.2
5.4\tMeasurement of probe shank profile <\/td>\n<\/tr>\n
16<\/td>\nFigure fig_3
Section sec_5.4.3 <\/td>\n<\/tr>\n
17<\/td>\nFigure fig_4
Section sec_5.5
Section sec_5.5.1
5.5\tUncertainty of the measurement of the probe shank profile <\/td>\n<\/tr>\n
18<\/td>\nSection sec_5.5.2
Section sec_6
6\tReporting of probe characteristics <\/td>\n<\/tr>\n
20<\/td>\nAnnex sec_A
Annex sec_A.1
Figure fig_A.1
Annex sec_A.2
Annex\u00a0A
\n(informative)<\/p>\n

Dependence of AFM images on measurement mode and settings <\/td>\n<\/tr>\n

21<\/td>\nFigure fig_A.2 <\/td>\n<\/tr>\n
22<\/td>\nFigure fig_A.3 <\/td>\n<\/tr>\n
23<\/td>\nAnnex sec_B
Annex sec_B.1
Figure fig_B.1
Table tab_B.1
Annex sec_B.2
Annex\u00a0B
\n(normative)<\/p>\n

Reference sample preparation <\/td>\n<\/tr>\n

24<\/td>\nFigure fig_B.2
Annex sec_B.3 <\/td>\n<\/tr>\n
25<\/td>\nFigure fig_B.3 <\/td>\n<\/tr>\n
26<\/td>\nAnnex sec_C
Annex sec_C.1
Annex\u00a0C
\n(informative)<\/p>\n

Example of a reference structure <\/td>\n<\/tr>\n

27<\/td>\nFigure fig_C.1 <\/td>\n<\/tr>\n
28<\/td>\nAnnex sec_D
Annex sec_D.1
Annex\u00a0D
\n(informative)<\/p>\n

Results of EPSC measurement repeatability test <\/td>\n<\/tr>\n

29<\/td>\nFigure fig_D.1
Figure fig_D.2 <\/td>\n<\/tr>\n
30<\/td>\nAnnex sec_E
Figure fig_E.1
Annex\u00a0E
\n(informative)<\/p>\n

Plane correction for probe shank profile analysis <\/td>\n<\/tr>\n

31<\/td>\nAnnex sec_F
Table tab_F.1
Annex\u00a0F
\n(informative)<\/p>\n

Example of a report <\/td>\n<\/tr>\n

33<\/td>\nReference ref_1
Reference ref_2
Reference ref_3
Reference ref_4
Reference ref_5
Reference ref_6
Reference ref_7
Reference ref_8
Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2014<\/td>\n36<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290614,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290612","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290612","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290614"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290612"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290612"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290612"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}