{"id":290723,"date":"2024-10-19T19:43:56","date_gmt":"2024-10-19T19:43:56","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-164132013\/"},"modified":"2024-10-25T16:44:29","modified_gmt":"2024-10-25T16:44:29","slug":"bs-iso-164132013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-164132013\/","title":{"rendered":"BS ISO 16413:2013"},"content":{"rendered":"

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\nSection sec_1
Section sec_2
Section sec_2.1
1\tScope
2\tTerms, definitions, symbols and abbreviated terms
2.1\tTerms and definitions <\/td>\n<\/tr>\n
12<\/td>\nSection sec_2.2
Section sec_3
Section sec_3.1
Section sec_3.1.1
2.2\tSymbols and abbreviated terms
3\tInstrumental requirements, alignment and positioning guidelines
3.1\tInstrumental requirements for the scanning method <\/td>\n<\/tr>\n
13<\/td>\nTable tab_b
Figure fig_1
Table tab_c
Figure fig_2
Section sec_3.1.2
Section sec_3.1.2.1 <\/td>\n<\/tr>\n
14<\/td>\nSection sec_3.1.2.2 <\/td>\n<\/tr>\n
15<\/td>\nTable tab_d
Figure fig_3 <\/td>\n<\/tr>\n
16<\/td>\nSection sec_3.1.3
Section sec_3.1.3.1
Section sec_3.1.3.2
Section sec_3.1.4
Section sec_3.1.5 <\/td>\n<\/tr>\n
17<\/td>\nSection sec_3.2
Section sec_3.3
3.2\tInstrument alignment
3.3\tSpecimen alignment <\/td>\n<\/tr>\n
19<\/td>\nTable tab_e
Figure fig_4
Section sec_4
Section sec_4.1
Section sec_4.2
Section sec_4.3
4\tData collection and storage
4.1\tPreliminary remarks
4.2\tData scan parameters
4.3\tDynamic range <\/td>\n<\/tr>\n
20<\/td>\nSection sec_4.4
Section sec_4.4.1
Section sec_4.4.2
Section sec_4.5
Section sec_4.6
4.4\tStep size (peak definition)
4.5\tCollection time (accumulated counts)
4.6\tSegmented data collection <\/td>\n<\/tr>\n
21<\/td>\nSection sec_4.7
Section sec_4.8
Section sec_4.9
Section sec_4.10
Section sec_4.10.1
Section sec_4.10.2
4.7\tReduction of noise
4.8\tDetectors
4.9\tEnvironment
4.10\tData storage <\/td>\n<\/tr>\n
22<\/td>\nSection sec_5
Section sec_5.1
Section sec_5.2
Section sec_5.2.1
5\tData analysis
5.1\tPreliminary data treatment
5.2\tSpecimen modelling <\/td>\n<\/tr>\n
23<\/td>\nSection sec_5.2.2
Figure fig_5
Figure fig_6 <\/td>\n<\/tr>\n
24<\/td>\nSection sec_5.3
Section sec_5.4
Table tab_f
Figure fig_7
5.3\tSimulation of XRR data
5.4\tGeneral examples <\/td>\n<\/tr>\n
25<\/td>\nTable tab_g
Figure fig_8
Table tab_h
Figure fig_9 <\/td>\n<\/tr>\n
26<\/td>\nTable tab_i
Figure fig_10
Table tab_j
Figure fig_11 <\/td>\n<\/tr>\n
27<\/td>\nTable tab_k
Figure fig_12
Section sec_5.5
5.5\tData fitting <\/td>\n<\/tr>\n
28<\/td>\nFigure fig_13 <\/td>\n<\/tr>\n
29<\/td>\nSection sec_6
Section sec_6.1
Section sec_6.2
6\tInformation required when reporting XRR analysis
6.1\tGeneral
6.2\tExperimental details <\/td>\n<\/tr>\n
30<\/td>\nSection sec_6.3
6.3\tAnalysis (simulation and fitting) procedures <\/td>\n<\/tr>\n
31<\/td>\nSection sec_6.4
Section sec_6.4.1
Section sec_6.4.2
6.4\tMethods for reporting XRR curves <\/td>\n<\/tr>\n
32<\/td>\nTable tab_l
Figure fig_14
Table tab_m
Figure fig_15 <\/td>\n<\/tr>\n
33<\/td>\nTable tab_n
Figure fig_16 <\/td>\n<\/tr>\n
34<\/td>\nAnnex sec_A
Annex\u00a0A
\n(informative)<\/p>\n

Example of report for an oxynitrided silicon wafer <\/td>\n<\/tr>\n

35<\/td>\nTable tab_o
Figure fig_A.1 <\/td>\n<\/tr>\n
36<\/td>\nTable tab_A.1
Table tab_p
Figure fig_A.2 <\/td>\n<\/tr>\n
37<\/td>\nTable tab_q
Figure fig_A.3 <\/td>\n<\/tr>\n
38<\/td>\nReference ref_1
Reference ref_2
Reference ref_3
Reference ref_4
Reference ref_5
Reference ref_6
Reference ref_7
Reference ref_8
Reference ref_9
Reference ref_10
Reference ref_11
Reference ref_12
Reference ref_13
Reference ref_14
Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2013<\/td>\n42<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290730,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290723","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290723","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290730"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290723"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290723"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290723"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}