{"id":290723,"date":"2024-10-19T19:43:56","date_gmt":"2024-10-19T19:43:56","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-164132013\/"},"modified":"2024-10-25T16:44:29","modified_gmt":"2024-10-25T16:44:29","slug":"bs-iso-164132013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-164132013\/","title":{"rendered":"BS ISO 16413:2013"},"content":{"rendered":"
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
---|---|---|---|---|---|---|---|
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | Section sec_1 Section sec_2 Section sec_2.1 1\tScope 2\tTerms, definitions, symbols and abbreviated terms 2.1\tTerms and definitions <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | Section sec_2.2 Section sec_3 Section sec_3.1 Section sec_3.1.1 2.2\tSymbols and abbreviated terms 3\tInstrumental requirements, alignment and positioning guidelines 3.1\tInstrumental requirements for the scanning method <\/td>\n<\/tr>\n | ||||||
13<\/td>\n | Table tab_b Figure fig_1 Table tab_c Figure fig_2 Section sec_3.1.2 Section sec_3.1.2.1 <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | Section sec_3.1.2.2 <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Table tab_d Figure fig_3 <\/td>\n<\/tr>\n | ||||||
16<\/td>\n | Section sec_3.1.3 Section sec_3.1.3.1 Section sec_3.1.3.2 Section sec_3.1.4 Section sec_3.1.5 <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | Section sec_3.2 Section sec_3.3 3.2\tInstrument alignment 3.3\tSpecimen alignment <\/td>\n<\/tr>\n | ||||||
19<\/td>\n | Table tab_e Figure fig_4 Section sec_4 Section sec_4.1 Section sec_4.2 Section sec_4.3 4\tData collection and storage 4.1\tPreliminary remarks 4.2\tData scan parameters 4.3\tDynamic range <\/td>\n<\/tr>\n | ||||||
20<\/td>\n | Section sec_4.4 Section sec_4.4.1 Section sec_4.4.2 Section sec_4.5 Section sec_4.6 4.4\tStep size (peak definition) 4.5\tCollection time (accumulated counts) 4.6\tSegmented data collection <\/td>\n<\/tr>\n | ||||||
21<\/td>\n | Section sec_4.7 Section sec_4.8 Section sec_4.9 Section sec_4.10 Section sec_4.10.1 Section sec_4.10.2 4.7\tReduction of noise 4.8\tDetectors 4.9\tEnvironment 4.10\tData storage <\/td>\n<\/tr>\n | ||||||
22<\/td>\n | Section sec_5 Section sec_5.1 Section sec_5.2 Section sec_5.2.1 5\tData analysis 5.1\tPreliminary data treatment 5.2\tSpecimen modelling <\/td>\n<\/tr>\n | ||||||
23<\/td>\n | Section sec_5.2.2 Figure fig_5 Figure fig_6 <\/td>\n<\/tr>\n | ||||||
24<\/td>\n | Section sec_5.3 Section sec_5.4 Table tab_f Figure fig_7 5.3\tSimulation of XRR data 5.4\tGeneral examples <\/td>\n<\/tr>\n | ||||||
25<\/td>\n | Table tab_g Figure fig_8 Table tab_h Figure fig_9 <\/td>\n<\/tr>\n | ||||||
26<\/td>\n | Table tab_i Figure fig_10 Table tab_j Figure fig_11 <\/td>\n<\/tr>\n | ||||||
27<\/td>\n | Table tab_k Figure fig_12 Section sec_5.5 5.5\tData fitting <\/td>\n<\/tr>\n | ||||||
28<\/td>\n | Figure fig_13 <\/td>\n<\/tr>\n | ||||||
29<\/td>\n | Section sec_6 Section sec_6.1 Section sec_6.2 6\tInformation required when reporting XRR analysis 6.1\tGeneral 6.2\tExperimental details <\/td>\n<\/tr>\n | ||||||
30<\/td>\n | Section sec_6.3 6.3\tAnalysis (simulation and fitting) procedures <\/td>\n<\/tr>\n | ||||||
31<\/td>\n | Section sec_6.4 Section sec_6.4.1 Section sec_6.4.2 6.4\tMethods for reporting XRR curves <\/td>\n<\/tr>\n | ||||||
32<\/td>\n | Table tab_l Figure fig_14 Table tab_m Figure fig_15 <\/td>\n<\/tr>\n | ||||||
33<\/td>\n | Table tab_n Figure fig_16 <\/td>\n<\/tr>\n | ||||||
34<\/td>\n | Annex sec_A Annex\u00a0A \n(informative)<\/p>\n Example of report for an oxynitrided silicon wafer <\/td>\n<\/tr>\n | ||||||
35<\/td>\n | Table tab_o Figure fig_A.1 <\/td>\n<\/tr>\n | ||||||
36<\/td>\n | Table tab_A.1 Table tab_p Figure fig_A.2 <\/td>\n<\/tr>\n | ||||||
37<\/td>\n | Table tab_q Figure fig_A.3 <\/td>\n<\/tr>\n | ||||||
38<\/td>\n | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting<\/b><\/p>\n |