{"id":358673,"date":"2024-10-20T01:22:24","date_gmt":"2024-10-20T01:22:24","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-iso-25178-6042013\/"},"modified":"2024-10-26T01:59:07","modified_gmt":"2024-10-26T01:59:07","slug":"bs-en-iso-25178-6042013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-iso-25178-6042013\/","title":{"rendered":"BS EN ISO 25178-604:2013"},"content":{"rendered":"<p>This part of ISO&nbsp;25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.<\/p>\n<h4>PDF Catalog<\/h4>\n<table border=\"1px\" class=\"des-table\">\n<tr>\n<th>PDF Pages<\/th>\n<th>PDF Title<\/th>\n<\/tr>\n<tr>\n<td><b>6<b><\/td>\n<td>Foreword  <\/td>\n<\/tr>\n<tr>\n<td><b>7<b><\/td>\n<td>Introduction  <\/td>\n<\/tr>\n<tr>\n<td><b>9<b><\/td>\n<td>Section sec_1 <br \/> Section sec_2 <br \/> Section sec_2.1 <br \/> Section sec_2.1.1 <br \/> Section sec_2.1.2 <br \/> 1\tScope <br \/> 2\tTerms and definitions <br \/> 2.1\tTerms and definitions related to all areal surface texture measurement methods  <\/td>\n<\/tr>\n<tr>\n<td><b>10<b><\/td>\n<td>Table tab_a <br \/> Figure fig_1 <br \/> Section sec_2.1.3 <br \/> Section sec_2.1.4  <\/td>\n<\/tr>\n<tr>\n<td><b>11<b><\/td>\n<td>Section sec_2.1.5 <br \/> Section sec_2.1.6 <br \/> Section sec_2.1.7 <br \/> Section sec_2.1.8 <br \/> Section sec_2.1.9 <br \/> Section sec_2.1.10  <\/td>\n<\/tr>\n<tr>\n<td><b>12<b><\/td>\n<td>Section sec_2.1.11 <br \/> Section sec_2.1.12 <br \/> Section sec_2.1.13 <br \/> Section sec_2.1.14 <br \/> Section sec_2.1.15 <br \/> Section sec_2.1.16  <\/td>\n<\/tr>\n<tr>\n<td><b>13<b><\/td>\n<td>Section sec_2.1.17 <br \/> Section sec_2.1.18 <br \/> Section sec_2.1.19 <br \/> Section sec_2.1.20  <\/td>\n<\/tr>\n<tr>\n<td><b>14<b><\/td>\n<td>Section sec_2.1.21 <br \/> Table tab_1 <br \/> Section sec_2.2 <br \/> Section sec_2.2.1 <br \/> Section sec_2.2.2 <br \/> 2.2\tTerms and definitions related to x- and y-scanning systems  <\/td>\n<\/tr>\n<tr>\n<td><b>15<b><\/td>\n<td>Table tab_2 <br \/> Section sec_2.2.3 <br \/> Section sec_2.2.4 <br \/> Section sec_2.2.5 <br \/> Section sec_2.2.6 <br \/> Section sec_2.2.7  <\/td>\n<\/tr>\n<tr>\n<td><b>16<b><\/td>\n<td>Section sec_2.2.8 <br \/> Section sec_2.3 <br \/> Section sec_2.3.1 <br \/> Section sec_2.3.2 <br \/> Section sec_2.3.3 <br \/> Section sec_2.3.4 <br \/> Section sec_2.3.5 <br \/> 2.3\tTerms and definitions related to optical systems  <\/td>\n<\/tr>\n<tr>\n<td><b>17<b><\/td>\n<td>Table tab_b <br \/> Figure fig_2 <br \/> Section sec_2.3.6 <br \/> Section sec_2.3.7 <br \/> Section sec_2.3.8  <\/td>\n<\/tr>\n<tr>\n<td><b>18<b><\/td>\n<td>Section sec_2.4 <br \/> Section sec_2.4.1 <br \/> Section sec_2.4.2 <br \/> Section sec_2.4.3 <br \/> Section sec_2.4.4 <br \/> Section sec_2.4.5 <br \/> Section sec_2.4.6 <br \/> Section sec_2.5 <br \/> Section sec_2.5.1 <br \/> 2.4\tTerms and definitions related to optical properties of the workpiece <br \/> 2.5\tTerms and definitions specific to coherence scanning interferometric microscopy  <\/td>\n<\/tr>\n<tr>\n<td><b>19<b><\/td>\n<td>Table tab_3 <br \/> Section sec_2.5.2 <br \/> Section sec_2.5.3  <\/td>\n<\/tr>\n<tr>\n<td><b>20<b><\/td>\n<td>Table tab_c <br \/> Figure fig_3 <br \/> Section sec_2.5.4 <br \/> Section sec_2.5.5 <br \/> Section sec_2.5.6  <\/td>\n<\/tr>\n<tr>\n<td><b>21<b><\/td>\n<td>Section sec_2.5.7 <br \/> Section sec_2.5.8 <br \/> Section sec_2.5.9 <br \/> Section sec_2.5.10 <br \/> Section sec_2.5.11 <br \/> Section sec_2.5.12  <\/td>\n<\/tr>\n<tr>\n<td><b>22<b><\/td>\n<td>Section sec_2.5.13 <br \/> Section sec_2.5.14 <br \/> Section sec_2.5.15 <br \/> Section sec_2.5.16 <br \/> Section sec_3 <br \/> Section sec_3.1 <br \/> Section sec_3.2 <br \/> 3\tDescriptions of the influence quantities <br \/> 3.1\tGeneral <br \/> 3.2\tInfluence quantities  <\/td>\n<\/tr>\n<tr>\n<td><b>23<b><\/td>\n<td>Table tab_4  <\/td>\n<\/tr>\n<tr>\n<td><b>25<b><\/td>\n<td>Annex sec_A <br \/> Annex sec_A.1 <br \/> Annex\u00a0A<br \/>\n(informative)<\/p>\n<p>Overview and components of a coherence scanning interferometry (CSI) microscope  <\/td>\n<\/tr>\n<tr>\n<td><b>26<b><\/td>\n<td>Table tab_d <br \/> Figure fig_A.1 <br \/> Annex sec_A.2 <br \/> Annex sec_A.3  <\/td>\n<\/tr>\n<tr>\n<td><b>27<b><\/td>\n<td>Annex sec_A.4 <br \/> Table tab_e <br \/> Figure fig_A.2  <\/td>\n<\/tr>\n<tr>\n<td><b>28<b><\/td>\n<td>Table tab_f <br \/> Figure fig_A.3  <\/td>\n<\/tr>\n<tr>\n<td><b>29<b><\/td>\n<td>Annex sec_A.5 <br \/> Annex sec_A.6  <\/td>\n<\/tr>\n<tr>\n<td><b>30<b><\/td>\n<td>Annex sec_B <br \/> Annex sec_B.1 <br \/> Table tab_g <br \/> Figure fig_B.1 <br \/> Annex sec_B.2 <br \/> Annex sec_B.2.1 <br \/> Annex\u00a0B<br \/>\n(informative)<\/p>\n<p>Coherence scanning interferometry (CSI) theory of operation  <\/td>\n<\/tr>\n<tr>\n<td><b>31<b><\/td>\n<td>Table tab_h <br \/> Figure fig_B.2 <br \/> Annex sec_B.2.2  <\/td>\n<\/tr>\n<tr>\n<td><b>32<b><\/td>\n<td>Table tab_i <br \/> Figure fig_B.3  <\/td>\n<\/tr>\n<tr>\n<td><b>33<b><\/td>\n<td>Table tab_j <br \/> Figure fig_B.4 <br \/> Annex sec_B.2.3  <\/td>\n<\/tr>\n<tr>\n<td><b>34<b><\/td>\n<td>Table tab_k <br \/> Figure fig_B.5 <br \/> Table tab_l <br \/> Figure fig_B.6  <\/td>\n<\/tr>\n<tr>\n<td><b>35<b><\/td>\n<td>Annex sec_B.3 <br \/> Annex sec_B.4  <\/td>\n<\/tr>\n<tr>\n<td><b>36<b><\/td>\n<td>Annex sec_B.5 <br \/> Table tab_B.1  <\/td>\n<\/tr>\n<tr>\n<td><b>37<b><\/td>\n<td>Table tab_m <br \/> Figure fig_B.7 <br \/> Annex sec_B.6 <br \/> Annex sec_B.7  <\/td>\n<\/tr>\n<tr>\n<td><b>38<b><\/td>\n<td>Table tab_n <br \/> Figure fig_B.8 <br \/> Annex sec_B.8  <\/td>\n<\/tr>\n<tr>\n<td><b>39<b><\/td>\n<td>Annex sec_C <br \/> Annex sec_C.1 <br \/> Annex\u00a0C<br \/>\n(informative)<\/p>\n<p>Spatial resolution  <\/td>\n<\/tr>\n<tr>\n<td><b>40<b><\/td>\n<td>Table tab_o <br \/> Figure fig_C.1  <\/td>\n<\/tr>\n<tr>\n<td><b>41<b><\/td>\n<td>Table tab_C.1 <br \/> Annex sec_C.2  <\/td>\n<\/tr>\n<tr>\n<td><b>42<b><\/td>\n<td>Table tab_p <br \/> Figure fig_C.2  <\/td>\n<\/tr>\n<tr>\n<td><b>43<b><\/td>\n<td>Table tab_q <br \/> Figure fig_C.3  <\/td>\n<\/tr>\n<tr>\n<td><b>44<b><\/td>\n<td>Annex sec_D <br \/> Annex\u00a0D<br \/>\n(informative)<\/p>\n<p>Example procedure for estimating surface topography repeatability  <\/td>\n<\/tr>\n<tr>\n<td><b>45<b><\/td>\n<td>Annex sec_E <br \/> Annex sec_E.1 <br \/> Annex sec_E.2 <br \/> Annex sec_E.3 <br \/> Annex\u00a0E<br \/>\n(informative)<\/p>\n<p>Relation to the GPS matrix model  <\/td>\n<\/tr>\n<tr>\n<td><b>46<b><\/td>\n<td>Table tab_E.1 <br \/> Annex sec_E.4  <\/td>\n<\/tr>\n<tr>\n<td><b>47<b><\/td>\n<td>Reference ref_1 <br \/> Reference ref_2 <br \/> Reference ref_3 <br \/> Reference ref_4 <br \/> Reference ref_5 <br \/> Reference ref_6 <br \/> Reference ref_7 <br \/> Reference ref_8 <br \/> Reference ref_9 <br \/> Reference ref_10 <br \/> Reference ref_11 <br \/> Reference ref_12 <br \/> Reference ref_13 <br \/> Reference ref_14 <br \/> Reference ref_15 <br \/> Reference ref_16 <br \/> Reference ref_17 <br \/> Reference ref_18 <br \/> Reference ref_19 <br \/> Reference ref_20 <br \/> Reference ref_21 <br \/> Bibliography  <\/td>\n<\/tr>\n<tr>\n<td><b>48<b><\/td>\n<td>Reference ref_22 <br \/> Reference ref_23 <br \/> Reference ref_24 <br \/> Reference ref_25 <br \/> Reference ref_26 <br \/> Reference ref_27 <br \/> Reference ref_28 <br \/> Reference ref_29 <br \/> Reference ref_30 <br \/> Reference ref_31 <br \/> Reference ref_32 <br \/> Reference ref_33 <br \/> Reference ref_34 <br \/> Reference ref_35 <br \/> Reference ref_36 <br \/> Reference ref_37 <br \/> Reference ref_38 <br \/> Reference ref_39 <br \/> Reference ref_40 <br \/> Reference ref_41  <\/td>\n<\/tr>\n<tr>\n<td><b>49<b><\/td>\n<td>Reference ref_42 <br \/> Reference ref_43 <br \/> Reference ref_44 <br \/> Reference ref_45 <br \/> Reference ref_46 <br \/> Reference ref_47 <br \/> Reference ref_48 <br \/> Reference ref_49 <br \/> Reference ref_50 <br \/> Reference ref_51 <br \/> Reference ref_52 <br \/> Reference ref_53 <br \/> Reference ref_54 <br \/> Reference ref_55 <br \/> Reference ref_56 <br \/> Reference ref_57 <br \/> Reference ref_58 <br \/> Reference ref_59  <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"<p><b>Geometrical product specifications (GPS). Surface texture: Areal &#8211; Nominal characteristics of non-contact (coherence scanning interferometry) instruments<\/b><\/p>\n<table class=\"shortdes-table\" style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/bsi\/\"><b>BSI<\/b><\/a><\/td>\n<td>2013<\/td>\n<td>52<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":358680,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[255,2641],"product_tag":[],"class_list":{"0":"post-358673","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-17-040-20","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/358673","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/358680"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=358673"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=358673"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=358673"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}