ASME MFC 21.1 2015 R2020
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ASME MFC-21.1-2015 (R2020): Measurement of Gas Flow by Means of Capillary Tube Thermal Mass Flowmeters and Mass Flow Controllers
| Published By | Publication Date | Number of Pages |
| ASME | 2015 | 38 |
This Standard establishes common terminology and gives guidelines for the quality, description, principle of operation, selection, operation, installation, and flow calibration of capillary tube thermal mass flow meters and controllers for the measurement and control of the mass flow rate of gases. The content of this standard applies to single-phase flows of pure gases and gas mixtures of known composition.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 4 | CONTENTS |
| 5 | FOREWORD |
| 6 | ASME MFC COMMITTEE ROSTER |
| 7 | CORRESPONDENCE WITH THE MFC COMMITTEE |
| 8 | 1 SCOPE 2 TERMINOLOGY, SYMBOLS, AND REFERENCES 2.1 Definitions From MFC-1M |
| 9 | 2.2 Definitions Specific to This Document |
| 11 | 2.3 Symbols Used in This Standard 2.4 Abbreviations Used in This Standard 2.5 References 3 GENERAL DESCRIPTION 3.1 Mass Flowmeters MFMs and Mass Flow Controllers MFCs 3.2 General Purpose and Semiconductor Applications |
| 12 | Tables Table 2.3-1 Symbols |
| 13 | Table 2.4-1 Abbreviations |
| 14 | 3.3 Liquid Flows 3.4 Major Components of MFMs and MFCs 3.5 Operation Figures Fig. 3.2-1 Typical General Purpose Mass Flow Controller (MFC) |
| 15 | Fig. 3.2-2 Typical Semiconductor Mass Flow Controller (MFC) Fig. 3.5-1 Flow Paths in Mass Flowmeters (MFMs) |
| 16 | 3.6 Flow Body |
| 17 | 3.7 Flow Conditioning Section 3.8 Bypass 3.9 Sensor Tube |
| 18 | 3.10 Control Valve |
| 19 | 3.11 Electronics |
| 20 | 4 PERFORMANCE AND OPERATING SPECIFICATIONS 4.1 Introduction 4.2 Flow Ranges 4.3 Accuracy Table 4.2-1 Flow Ranges |
| 21 | 4.4 Repeatability and Reproducibility 4.5 Rangeability 4.6 Response Time 4.7 Gas Temperature and Pressure 4.8 Leak Integrity |
| 22 | 5 PRINCIPLE OF OPERATION 5.1 Laminar Flow Bypass 5.2 Heat Capacity Rate, qmcp |
| 24 | 5.3 Instrument Output |
| 25 | 5.4 Linear Range 6 STANDARD VOLUMETRIC FLOW RATE 6.1 Description |
| 26 | Fig. 5.4-1 Instrument Outputs Versus the Mass Flow Rate, qm, Through the Sensor Tube for Four Different Gases Fig. 5.4-2 Instrument Outputs Versus Heat Capacity Rate, qmcp, for the Same Four Gases in Fig. 5.4-1 |
| 27 | 6.2 Conversion of Volumetric Flow Rates 7 CONVERSION FROM ONE GAS TO ANOTHER |
| 28 | 8 BEST PRACTICES 8.1 Gases to Avoid 8.2 Best Practices for Users |
| 29 | 8.3 Best Practices for Manufacturers 8.4 Flow Recalibration |
| 30 | MANDATORY APPENDIX I GAS FLOW CALIBRATION I-1 INTRODUCTION I-2 GAS FLOW CALIBRATION FACILITY I-3 DATA POINTS AND CURVE FITTING I-4 FLOW CALIBRATION STANDARDS I-5 PRIMARY AND SECONDARY STANDARDS |
| 31 | I-6 PRIMARY STANDARDS — PISTON PROVERS AND BELL PROVERS I-7 SECONDARY STANDARDS |
| 32 | NONMANDATORY APPENDIX A ENERGY EQUATION FOR THE GAS FLOWING IN THE SENSOR TUBE A-1 CHARACTERIZATION OF THE FLOW IN THE SENSOR TUBE A-2 ENERGY DIFFERENTIAL EQUATION |
| 33 | Fig. A-1 Differential Control Volume for the Gas Flowing in the Sensor Tube |
| 34 | NONMANDATORY APPENDIX B BIBLIOGRAPHY |
| 36 | How can you reach us? ItŒs easier than ever! |
