ASTM-E673 2002
$40.63
E673-02 Standard Terminology Relating to Surface Analysis
Published By | Publication Date | Number of Pages |
ASTM | 2002 | 10 |
ASTM E673-02
Historical Standard: Standard Terminology Relating to Surface Analysis
ASTM E673
Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Keywords
terminology
ICS Code
ICS Number Code 01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))
DOI: 10.1520/E0673-02