{"id":421998,"date":"2024-10-20T06:39:05","date_gmt":"2024-10-20T06:39:05","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-pd-iec-tr-632582021-3\/"},"modified":"2024-10-26T12:26:42","modified_gmt":"2024-10-26T12:26:42","slug":"bsi-pd-iec-tr-632582021-3","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-pd-iec-tr-632582021-3\/","title":{"rendered":"BSI PD IEC TR 63258:2021"},"content":{"rendered":"

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nundefined <\/td>\n<\/tr>\n
4<\/td>\nCONTENTS <\/td>\n<\/tr>\n
5<\/td>\nFOREWORD <\/td>\n<\/tr>\n
7<\/td>\nINTRODUCTION <\/td>\n<\/tr>\n
8<\/td>\n1 Scope
2 Normative references
3 Terms and definitions
3.1 General terms <\/td>\n<\/tr>\n
9<\/td>\n3.2 Terms specific to this document <\/td>\n<\/tr>\n
10<\/td>\n4 Measurement of ellipsometry
4.1 General
Figures
Figure 1 \u2013 Primary structure of ellipsometry measurement <\/td>\n<\/tr>\n
11<\/td>\n4.2 Measurement procedure
4.2.1 Sample preparation for system check
4.2.2 Experimental procedure for system check
4.2.3 Sample handling
4.2.4 Experimental procedures <\/td>\n<\/tr>\n
12<\/td>\n5 Reporting data
6 Data analysis \/ interpretation of results
6.1 General <\/td>\n<\/tr>\n
13<\/td>\n6.2 Setting analysis model
Figure 2 \u2013 Flow chart of the ellipsometry data analysis <\/td>\n<\/tr>\n
14<\/td>\n6.3 Data fitting and validation of analysis result
6.3.1 General <\/td>\n<\/tr>\n
15<\/td>\n6.3.2 Data analysis method 1 \u2013 Dispersion law (Cauchy model) [6]
6.3.3 Data analysis method 2 \u2013 Sellmeier equation model (transparent material) [7]
6.3.4 Data analysis method 3 \u2013 Drude dispersion model (conductive material) [8], [9] <\/td>\n<\/tr>\n
16<\/td>\n6.3.5 Data analysis method 4 \u2013 Dispersion law (classical model \/ Lorentz model) [8], [9] <\/td>\n<\/tr>\n
17<\/td>\n6.3.6 Data analysis method 5 \u2013 Forouhi-Bloomer dispersion model [10], [11]
6.3.7 Data analysis method 6 \u2013 Tauc-Lorentz dispersion model (amorphous materials) [12], [13] <\/td>\n<\/tr>\n
19<\/td>\nAnnex A (informative)Case study: Interlaboratory comparison by using SiO2\/Si samples
Figure A.1 \u2013 An example of the report form of ellipsometry measurements <\/td>\n<\/tr>\n
20<\/td>\nFigure A.2 \u2013 An example of the results of the interlaboratory comparison
Figure A.3 \u2013 The wafer-shaped sample used for the interlaboratory comparison <\/td>\n<\/tr>\n
21<\/td>\nAnnex B (informative)Case study: Ellipsometry measurement of other materials <\/td>\n<\/tr>\n
22<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2021<\/td>\n24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":422006,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2641],"product_tag":[],"class_list":{"0":"post-421998","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-bsi","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/421998","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/422006"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=421998"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=421998"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=421998"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}