{"id":446119,"date":"2024-10-20T08:45:11","date_gmt":"2024-10-20T08:45:11","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-21360-52023\/"},"modified":"2024-10-26T16:18:18","modified_gmt":"2024-10-26T16:18:18","slug":"bs-iso-21360-52023","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-21360-52023\/","title":{"rendered":"BS ISO 21360-5:2023"},"content":{"rendered":"
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
---|---|---|---|---|---|---|---|
2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 4 Symbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | 5 Test methods 5.1 General 5.1.1 Test gases 5.1.2 Vacuum chamber 5.1.3 Orifice 5.1.4 Vacuum pumping system for rough pumping <\/td>\n<\/tr>\n | ||||||
13<\/td>\n | 5.1.5 Vacuum gauges 5.1.6 Temperature 5.1.7 Activation method of NEG 5.1.8 Procedure of sample installation and activation <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | 5.2 Throughput method for small NEG samples 5.2.1 Experimental setup <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | 5.2.2 Sample 5.2.3 Determination of getter pumping speed, S, and sorption quantity, Cq <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | 5.2.4 Determination of sticking probability, \u03b1 <\/td>\n<\/tr>\n | ||||||
18<\/td>\n | 5.2.5 Measurement procedure 5.2.6 Measurement uncertainty <\/td>\n<\/tr>\n | ||||||
19<\/td>\n | 5.3 Throughput method with test dome 5.3.1 Experimental setup <\/td>\n<\/tr>\n | ||||||
21<\/td>\n | 5.3.2 Sample 5.3.3 Determination of getter pumping speed S and sorption quantity, Cq 5.3.4 Determination of sticking probability, \u03b1 5.3.5 Measurement procedure <\/td>\n<\/tr>\n | ||||||
22<\/td>\n | 5.3.6 Measurement uncertainty 5.4 Transmission method for NEG coatings 5.4.1 Experimental setup <\/td>\n<\/tr>\n | ||||||
23<\/td>\n | 5.4.2 Sample 5.4.3 Determination of average getter pumping speed per unit area, SA, and sorption quantity Cq <\/td>\n<\/tr>\n | ||||||
25<\/td>\n | 5.4.4 Determination of sticking probability,\u03b1 5.4.5 Measurement procedure 5.4.6 Measurement uncertainty 5.5 Combination of transmission method and throughput method with test dome <\/td>\n<\/tr>\n | ||||||
27<\/td>\n | 6 Reporting 6.1 General 6.2 Small size of NEGs with the structure of pill, disk, ring, strip, module and cartridge 6.3 NEG pumps <\/td>\n<\/tr>\n | ||||||
28<\/td>\n | 6.4 NEG coatings <\/td>\n<\/tr>\n | ||||||
29<\/td>\n | Annex A (informative) Calculation method of the molecular conductance of the orifice <\/td>\n<\/tr>\n | ||||||
30<\/td>\n | Annex B (informative) Example of diagrams for pumping characteristics of NEG <\/td>\n<\/tr>\n | ||||||
31<\/td>\n | Annex C (informative) Typical value of initial sticking probability \u03b10 of NEG at room temperature <\/td>\n<\/tr>\n | ||||||
33<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Vacuum technology. Standard methods for measuring vacuum-pump performance – Non-evaporable getter (NEG) vacuum pumps<\/b><\/p>\n |