{"id":58341,"date":"2024-10-17T10:46:40","date_gmt":"2024-10-17T10:46:40","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/astm-e2245-2011\/"},"modified":"2024-10-24T17:32:12","modified_gmt":"2024-10-24T17:32:12","slug":"astm-e2245-2011","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/astm\/astm-e2245-2011\/","title":{"rendered":"ASTM-E2245 2011"},"content":{"rendered":"<\/p>\n

1.1 This test method covers a procedure for measuring the compressive residual strain in thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an interferometer. Measurements from fixed-fixed beams that are touching the underlying layer are not accepted.<\/p>\n

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.<\/p>\n

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.<\/i><\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
1<\/td>\nScope
Referenced Documents
Terminology <\/td>\n<\/tr>\n
4<\/td>\nSummary of Test Method
FIG. 1 <\/td>\n<\/tr>\n
5<\/td>\nSignificance and Use
FIG. 2
FIG. 3 <\/td>\n<\/tr>\n
6<\/td>\nInterferences
FIG. 4
FIG. 5 <\/td>\n<\/tr>\n
7<\/td>\nTest Units
FIG. 6
TABLE 1 <\/td>\n<\/tr>\n
8<\/td>\nProcedure ( <\/td>\n<\/tr>\n
9<\/td>\nFIG. 7 <\/td>\n<\/tr>\n
10<\/td>\nFIG. 8
FIG. 9 <\/td>\n<\/tr>\n
11<\/td>\nFIG. 10 <\/td>\n<\/tr>\n
12<\/td>\nCalculation (
FIG. 11 <\/td>\n<\/tr>\n
13<\/td>\nFIG. 12
FIG. 13 <\/td>\n<\/tr>\n
15<\/td>\nReport
Precision and Bias <\/td>\n<\/tr>\n
16<\/td>\nKeywords
TABLE 2
FIG. 14 <\/td>\n<\/tr>\n
17<\/td>\nFIG. 15
FIG. 16 <\/td>\n<\/tr>\n
18<\/td>\nA1. CALCULATION OF COMBINED STANDARD UNCERTAINTY
A1.1
A1.2
A1.3
A1.4
A1.5
A1.6
A1.7
A1.8
A1.9
A1.10 <\/td>\n<\/tr>\n
19<\/td>\nTABLE A1.1 <\/td>\n<\/tr>\n
20<\/td>\nA1.11
A1.12
A1.13
A1.14
A1.15
TABLE A1.2
TABLE A1.3
TABLE A1.4 <\/td>\n<\/tr>\n
21<\/td>\nX1. ADHERENCE OF SURFACE-MICROMACHINED FIXED-FIXED BEAM TO UNDERLYING LAYER
X1.1
FIG. X1.1 <\/td>\n<\/tr>\n
22<\/td>\nFIG. X1.2
FIG. X1.3 <\/td>\n<\/tr>\n
23<\/td>\nREFERENCES
FIG. X1.4 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

E2245-11 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ASTM<\/b><\/a><\/td>\n2011<\/td>\n24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":58342,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[714,2637],"product_tag":[],"class_list":{"0":"post-58341","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-37-040-20","7":"product_cat-astm","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/58341","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/58342"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=58341"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=58341"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=58341"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}